| 发明名称 |
CURRENT CHANGE LIMITING DEVICE |
| 摘要 |
<p>In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3).</p> |
| 申请公布号 |
CA2646522(A1) |
申请公布日期 |
2009.06.24 |
| 申请号 |
CA20082646522 |
申请日期 |
2008.12.11 |
| 申请人 |
HUETTINGER ELECTRONIC SP. Z.O.O (TPLE) |
发明人 |
OZIMEK, PAWEL;BUGYI, RAFAL;KLIMCZAK, ANDRZEJ |
| 分类号 |
H02H9/02;H01J37/00 |
主分类号 |
H02H9/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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