| 摘要 |
Provided are a polishing apparatus and a polishing method, which are enabled to calculate the external diameter of a wound polishing tape on a polishing tape feeding reel or a polishing tape recovery reel before the polishing operation by a simple operation, thereby to calculate the residual or the consumption of the polishing tape from that external diameter. The polishing apparatus comprises a polishing tape feeding reel (46), a polishing head (44), a polishing tape extracting mechanism (G1), and a polishing tape feeding/recovering mechanism (45) for recovering a polishing tape (43) from the polishing tape feeding reel (46) through the polishing head (44). The polishing tape feeding/recovering mechanism (45) includes a motor (Mb) for applying a torque to the polishing tape feeding reel (46) thereby to apply a predetermined tension to the polishing tape (43) passing through the polishing head (44), and a rotation angle detector (REa) for detecting the rotation angle of the polishing tape feeding reel (46). |
