COOLING JACKET OF GAS DISCAHRGE PIPE FOR SEMICONDUCTOR EQUIPMENT, AND MANUFACTURING PROCESS THEREOF

摘要

A cooling jacket of a gas discharge pipe for a semiconductor facility is provided to maximize cooling efficiency by contacting a cooling pipe with an outer circumference of the gas discharge pipe. A jacket for cooling a gas discharge pipe cools down the gas generated in a semiconductor facility. A gas induction path(11) is formed along the length direction center of the inner part of the metal jacket and induces the combustion gas. A plasma combustion unit and a gate valve are connected to an inlet(12) and an outlet(13) of the gas induction path through a connector(30). A plurality of cooling paths(20) are punched around the gas induction path. The cooling path is separated from the gas induction path and induces the coolant.