Total predictive monitoring system for semiconductor wafer in integrated circuit device fabrication plant, has response collector of agents receiving outputs of agents to generate indicating projection of production growth in plant

摘要

The system has a set of agents (170) separated in individual manner and formed by program codes stored in memories of different computers situated in fabrication plant. Each of the agents include a program code for executing a genetic algorithm and is configured to receive a group of input data for calculating and delivering a value of risk indicator of production output on output. Agent response collector receives the outputs of the agents so as to generate an indicating projection of production growth in the plant. An independent claim is also included for a computer implemented method for monitoring a fabrication process of integrated circuit device in a fabrication plant.