| 摘要 |
A feed through of ion injection apparatus is provided to replace individually an insulating member when insulation breakdown is generated, by assembling respective constituent elements. A housing(110) is installed in a processing chamber. An insulating member(120) is assembled to the inner side of the housing. A high voltage applying part(130) is assembled to the inner side of the insulating member. The high voltage applying part is electrically insulated with the housing by the insulating member. A sealing member(140) is inserted into the assembly surface of the housing and the processing chamber, and the assembly surface of the assembly surface of the housing and the insulating member and the insulating member and the assembly surface of high voltage applying part.
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