| 摘要 |
PROBLEM TO BE SOLVED: To provide a power probe with high laser durability. SOLUTION: The power probe comprises a base 2 composed of a material with a higher melting point than that of Al and thermal conductivity not smaller than a half but not larger than 3 times of Al conductivity, a laser absorbing part 1 composed of alumina (A1<SB>2</SB>0<SB>3</SB>) formed by a spraying process on a surface of the base 2, a temperature sensor 5 for measuring thermal energy absorbed by the laser absorbing part 1 and transmitted to the base 2, and a displaying part 4 where the thermal energy measured by the temperature sensor 5 is displayed. COPYRIGHT: (C)2009,JPO&INPIT
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