| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature sensor probe capable of measuring stably, and its manufacturing method. SOLUTION: This temperature sensor probe for measuring a temperature by using a phosphor whose fluorescence characteristic is changed according to a temperature is equipped with the powdery phosphor 25, and a waveguide member for propagating excitation light irradiated to the phosphor 25 and fluorescence generated from the phosphor 25. The particle size of the powdery phosphor 25 is in the range of 60-100μm. COPYRIGHT: (C)2009,JPO&INPIT
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