AIR CONDITIONING APPARATUS AND AIR CONDITIONING METHOD FOR CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To efficiently exhaust gas by utilizing a heat rise while preventing the deterioration of cleanliness by forming a side flow in an apparatus area. SOLUTION: This air conditioning apparatus for a clean room 1 having an apparatus area 11 for installing an apparatus to be kept clean and a passage area 12 includes: a blowout opening 13 disposed in a side wall surface of the clean room 1 to blow off clean air to the apparatus area 11; a suction opening 14 disposed in a position above the passage area 12 in a ceiling surface of the clean room 1 to suck the air of the passage area 12; and an eyelid 18 hanging down from the ceiling surface in the periphery of the suction opening 14 above the passage area 12 for making the clean air of a side flow pass to the apparatus area 11 and guiding the air to the suction opening 14. COPYRIGHT: (C)2009,JPO&INPIT