| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for supplying a solid raw material, in each of which the solid raw material can be gasified and the gasified raw material can be supplied quantitatively with high precision and for a long time. SOLUTION: The method for supplying the solid raw material includes the steps of: molding the powder of the solid raw material 11 into a shape, which has a constant cross-sectional area, a horizontal upper surface and a uniform and dense structure, without leaving a space among particles; packing the molded solid raw material in a vaporization vessel 12, which has an inside surface of the same shape as that of the outside surface of the molded solid raw material and the upper part of which is opened; enclosing the vaporization vessel in a mixing vessel 13 for mixing the gaseous raw material vaporized from the molded solid raw material in a carrier gas; introducing the carrier gas, the pressure and flow rate of which are adjusted to preset ones, into the mixing vessel through a carrier gas introduction route 14 in such a condition that the atmospheric temperature in the mixing vessel is kept at the preset temperature; and discharging the accompanied gas, which is obtained by mixing the vaporized gaseous raw material in the carrier gas and accompanied by the carrier gas, from the mixing vessel to an accompanied gas discharge route 15 and supplying the discharged accompanied gas to a supply destination. COPYRIGHT: (C)2009,JPO&INPIT
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