发明名称 VITREOUS SILICA CRUCIBLE
摘要 The present invention relates to a vitreous silica crucible for pulling up silicon single crystals by a pulling-up process having a first stage and a second stage after the first stage. The crucible comprises a transparent inner layer containing inner layer bubbles, and an outer layer containing outer layer bubbles. The second stage expansion coefficient X2 of the inner-layer bubbles during the second stage is set to 1/3 or less of the first stage expansion coefficient X1 of the inner-layer bubbles during the first stage.
申请公布号 US2009145351(A1) 申请公布日期 2009.06.11
申请号 US20080325047 申请日期 2008.11.28
申请人 JAPAN SUPER QUARTZ CORPORATION 发明人 KISHI HIROSHI;KANDA MINORU
分类号 C30B15/10 主分类号 C30B15/10
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