| 摘要 |
PROBLEM TO BE SOLVED: To provide a deflection detecting method for a wire, capable of detecting easily a deflection of the wire of a wire cassette for storing and carrying a large number of glass substrates. SOLUTION: A laser beam is emitted from at least three positions of the lateral central part and both end parts of the wire cassette 1, while being directed from this side of the wire cassette 1, toward a deep side to be at right-angle horizontally with respect to a wire line 4, timings of shielding the laser beam from the three points by the wire are measured, when lifting up and down the wire cassette, and a timing difference among the measured timings from the three points are compared with a timing difference which corresponds to a preset deflection of the wire, and whether the abnormality in the wire is abnormal is determined. COPYRIGHT: (C)2009,JPO&INPIT
|
