| 摘要 |
A substrate treating apparatus using ozone water is provided to prevent ozone gas leakage into a maintenance/repair region by sealing a driving part of a swing nozzle unit. A container(110) has a plurality of recovering bottles. The internal recovering bottle(110a) has an annular ring shape, and surrounds a spin head. The middle recovering bottle(110b) has an annular ring shape, and surrounds the internal recovering bottle. The external recovering bottle(110c) has an annular ring shape, and surrounds the middle recovering bottle. The recovering bottles have an inlet which is connected to an inner space of the container. A plurality of openings(113a) is formed in an inner wall of the internal recovering bottle. An outlet pipe(115a) is coupled in a bottom wall. An exhaust pipe(117) is coupled in the bottom wall of the external recovering bottle.
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