摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic linear measuring device in which the occupied area of an MR element part is small and the form of a sensor part is small, which can restrain a change in resistance due to stress acting on the MR element part and can use glass as a base material of the MR element part. SOLUTION: The MR element 16 is mounted on a substrate 22 so that two base materials 20, 21 on which the same resistance patterns R1, R2 exhibiting a magnetic resistance effect by ae vapor deposition thin film of ferromagnetic material metal are placed side by side along the moving direction of a magnet M where the resistance patterns R1, R2 move integrally with a piston 13. The MR element and an analog amplification circuit 17 which processes outputs of the MR element 16 are mounted on a circuit board 15. COPYRIGHT: (C)2009,JPO&INPIT
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