METHOD FOR MANUFACTURING LIQUID INJECTION HEAD, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid injection head and a method for manufacturing a piezoelectric element in which the thickness of a piezoelectric layer is equalized so that piezoelectric properties are equalized and reliability is improved.

SOLUTION: The methods comprise the steps of: forming a lower electrode 60 on one side of a passage formation substrate 110 on which is formed a pressure development chamber communicating with a nozzle opening for spraying a liquid; forming a piezoelectric layer 70 composed of a piezoelectric film 72 by applying a sol of an organometallic compound on the lower electrode 60 to form a piezoelectric precursor film and heating and burning the piezoelectric precursor film to crystallize the same to form the piezoelectric film 72; and forming an upper electrode on the piezoelectric layer 70. The methods further comprise planarizing the surface of the piezoelectric layer 70 in contact with the upper electrode by chemical mechanical polishing before forming the upper electrode.

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