| 摘要 |
PROBLEM TO BE SOLVED: To suppress that an object to be conveyed is not normally placed. SOLUTION: When the object to be conveyed is conveyed in a suspended state, shaking easily occurs in the course of lowering the object to be conveyed to an installation port. To cope with this, a holding part holding the object to be conveyed is lowered (S2) and when the object to be conveyed is placed on the installation port, lowering the holding part is stopped (S3). When a signal L_REQ from an installation port-side is in an on-state, namely when it is determined that the object to be conveyed is not normally placed (NO in S4), if such a state continues for a prescribed time (YES in S10), a retry operation is performed. Namely, the holding part is once raised (S11 and S12), and then the holding part is lowered again (S2 and S3). COPYRIGHT: (C)2009,JPO&INPIT
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