METHOD OF PRESSURIZED GAS PULSE CONTROL PROCESSING AND PRESSURIZED GAS PULSE CONTROL PROCESSING APPARATUS

摘要

A method of pressurized gas pulse control processing and pressurized gas pulse control processing apparatus that realize effective utilization of raw gas leading to efficient processing and accordingly reduction of processing cost. The pressurized gas pulse control processing is carried out in such a manner that in accordance with preset gas processing particulars, the opening and closing of electromagnetic valves (11 to 16) are controlled so as to conduct repeated processing of processing object (19) as often as the number of pulses required to complete the set processing particulars, each of the pulses consisting of introduction of processing gas, pressurized gas processing of the processing object (19), pressure reduction by spontaneous emission to air emission part (A) and evacuation by vacuum evacuation unit (3).