| 摘要 |
PROBLEM TO BE SOLVED: To perform optical detection of a contact state between a probe and a sample, and excitation of the probe, while driving the probe of a scanning probe microscope at very high speed, and to perform high-speed scanning probe detection, in correspondence with a sample where the sample side cannot be driven, such as, a large semiconductor substrate or a flat display substrate. SOLUTION: Beams for optically detecting the contact state between the probe and the sample and optically exciting the probe is introduced below an objective lens for observing the sample in the state of parallel light beams, condensed onto a fixed point on a cantilever by means of a fine condensing lens attached below the objective lens so as to be driven together with the cantilever, and is irradiated to the sample. Thus, even when the cantilever is moved, the fixed position on the cantilever can be irradiated at all times. Furthermore, since the condensing lens is very small, the sample can be scanned with the cantilever at high speed without influencing the dynamic characteristics of a cantilever drive unit so as to enable observation and measurement of the sample. COPYRIGHT: (C)2009,JPO&INPIT |
