发明名称 APPARATUS AND METHOD FOR PRESSURE-BONDING COMPONENT
摘要 <p>An apparatus for pressure-bonding a component is provided with a plurality of pressure-bonding units, which respectively have pressure-bonding heads for pressure-bonding components in substrate regions wherein the components are to be pressure-bonded, and end section supporting members for supporting end portions of a substrate, and the pressure-bonding units are arranged in a row. The apparatus is also provided with a guiding/supporting member, which guides a shift in a direction along the end portion where substrate bonding is to be performed and supports each pressure-bonding unit; a common head lifting apparatus for integrally bringing up and down each pressure-bonding head; and a plurality of unit transfer apparatuses, which are arranged for the pressure-bonding units, respectively, shift the pressure-bonding units along the end portion and change the arrangement of the pressure-bonding units.</p>
申请公布号 WO2009072282(A1) 申请公布日期 2009.06.11
申请号 WO2008JP03579 申请日期 2008.12.03
申请人 PANASONIC CORPORATION;ONITSUKA, YASUTO;KATAYAMA, ATSUSHI 发明人 ONITSUKA, YASUTO;KATAYAMA, ATSUSHI
分类号 H01L21/60 主分类号 H01L21/60
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