| 摘要 |
FIELD: physics; measurement. ^ SUBSTANCE: present invention relates to devices for making spikes on metallic and quartz probes and can be used for primary production of probes of scanning probe microscopes, as well as for repairing them. The device for making and controlling probes includes the first holder the probe, fitted on the first unit for displacement on the Z coordinate. The unit for making a spike on the probe with etching, is fitted on the second unit displacement on the Z coordinate and in the XY plane, perpendicular the Z coordinate, and a reservoir is also on the axis of the probe. The first and second displacement units, as well as a cup are located on a base. An optical microscope is used with a radiation source, fitted on a base, and a control unit, containing a device for measuring the control signal, of proportional cross sectional area of the probe in the etching zone. The unit for displacement on the Z coordinate is based on a step motor, connected to a transmission and the control unit. The unit for making spikes on the probe contains a frame electrode with etching, connected to the second holder. The first reservoir contains an etching agent. The frame electrode is fitted with possibility of submersion into the etching agent in the first reservoir and has two fixed positions: in the first reservoir and in the zone of making spikes of the probe, due to use of the first and second holders of the second displacement unit. ^ EFFECT: sharper probe. ^ 11 cl, 5 dwg |
