| 摘要 |
FIELD: physics; measurement. ^ SUBSTANCE: present invention relates to pressure/vacuum sensors for use in various applications with high degree of purity. The sensor comprises a connector, case, sensor unit, external heater, placed such that it can heat the sensor unit, and a detachable connector unit, which has an inlet and outlet. The inlet is connected to the connector of the sensor. In some versions the sensor unit comprises a detector element made from brittle material, and no filling fluid medium is used in the detecting element. In the other version the invention comprises a set, which receives non-heated high purity vacuum sensors for use with heating. The set comprises a connector unit and a heater unit, which is connected to the connector unit. The heater unit comprises a heater jacket, which can be attached to the outer surface of the sensor unit. The heater jacket comprises a temperature sensitive element, connected to the connector unit. The connector unit can also include one or more indicators. ^ EFFECT: simple design and more functional capabilities. ^ 27 cl, 9 dwg |
