Charged particle source with automated tip formation

摘要

A charged particle beam device is described. The device includes an emitter unit including an emitter tip (13); a voltage supply unit (222) adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member (224, 228) adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit (142; 142', 142") for measuring an emitter characteristic; and a control unit (130) adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.