发明名称 Method and structure for ultra narrow crack stop for multilevel semiconductor device
摘要 An integrated circuit design and a method of fabrication and, more particularly, a semiconductor structure having an ultra narrow crack stop for use in multilevel level devices and a method of making the same. The structure includes a first dielectric layer having a first connection connecting to an underlying interconnect and a second dielectric layer having a second connection connecting to the first connection. A stop gap structure extends through the first dielectric layer and the second dielectric layer, and has a width of about less than 1 um.
申请公布号 US7544602(B2) 申请公布日期 2009.06.09
申请号 US20070693033 申请日期 2007.03.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CLEVENGER LAWRENCE A.;COLBURN MATTHEW E.;LANDERS WILLIAM F.;LI WAI-KIN
分类号 H01L23/522 主分类号 H01L23/522
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