发明名称 ENVIRONMENTAL SENSOR AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an environmental sensor which is manufactured easily, manufactured at low cost, has good controllability on response time, and moreover, which can form a lot of sensing elements in an array shape. SOLUTION: The sensor (10, 30, 40, 50, 70) detecting a chemical substance and a variation in surrounding environment uses a sol-gel sensing element(14, 16, 17, 54, 56, 57) containing a chemical indicator. Grooves (12, 13, 24, 52, 53) are formed in a substrate (11, 51). The grooves are filled with the sol-gel material having the chemical indicator. The sol-gel material is hardened and adhered to the substrate (11, 51). The grooves (12, 13, 24, 52, 53) are formed so as to facilitate the optical coupling of a fiber-optic cable (46) to the sol-gel sensing element. Light is coupled to the sol-gel sensing element (14, 16, 17, 54, 56, 57) from the fiber-optic cable (46). COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009122124(A) 申请公布日期 2009.06.04
申请号 JP20090055522 申请日期 2009.03.09
申请人 FREESCALE SEMICONDUCTOR INC 发明人 DONALD E ACKLEY;MICHAEL RIAKU;SHIEH CHAN-LONG
分类号 G01N21/77;G01N21/27;G01N21/64;G01N21/78 主分类号 G01N21/77
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