| 摘要 |
PROBLEM TO BE SOLVED: To provide a helium gas bombing apparatus which allows an accurate helium leak test by reducing the time elapsed from the bombing termination time to the helium leak test starting time and can reduce costs without using a large number of tanks. SOLUTION: The helium bombing apparatus is provided with a chamber 20. The chamber 20 is tubular in shape, is arranged vertically, and has upper/lower end openings, either one of which is an inlet 21 and the other one of which is an outlet 22. A gas supply channel 27 is provided on the peripheral wall of the chamber 20 and is connected to a helium gas cylinder 80. Within the chamber 20 a large number of pallets 10 loaded with work are accommodated horizontally in a vertically stacked manner. By driving a push-in cylinder 30, the pallets 10 are pushed into the chamber 20 one by one and are sent off from the outlet 22 one by one. Through the pallet 10 and a seal ring 15 installed in the pallet 10, the gas supply channel 27 is isolated from the inlet 21 and the outlet 22. COPYRIGHT: (C)2009,JPO&INPIT
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