PIEZOELECTRIC/ELECTROSTRICTIVE CERAMIC AND PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE

摘要

Disclosed is a piezoelectric/electrostrictive ceramic having improved piezoelectric/electrostrictive characteristics and mechanical durability. Specifically disclosed is a piezoelectric/electrostrictive device (1) having a multilayer structure wherein an electrode film (110), a piezoelectric/electrostrictive film (112), an electrode film (114), a piezoelectric/electrostrictive film (116) and an electrode film (118) are arranged in this order on a thin portion (104) of a base (102). The piezoelectric/electrostrictive films (112, 116) are each composed of a ceramic film having a matrix of a perovskite oxide containing lead (Pb) as an A-site constituent element while containing nickel (Ni), aluminum (Al), niobium (Nb), zirconium (Zr) and titanium (Ti) as B-site constituent elements. The piezoelectric/electrostrictive films (112, 116) are formed by integrally firing the base (102) containing aluminum oxide and a coating film of an intermediate of a perovskite oxide containing constituent elements other than aluminum, so that aluminum oxide is diffused into the coating film of an intermediate from the base (102).