摘要 |
<p>New electrode, which measures between 20 x 25 cm and 100 x 200 cm, comprises of a metal backing plate (10) with tiles (14) fixed to one side (12), which are connected electrically. Each tile comprises a silicon based conducting substrate, attached to the plate by a connecting layer and, on the opposite side, a diamond layer that is rendered conductive by doping with boron and/or nitrogen.</p> |