| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a metal oxide film which can easily regulate the crystal state of a metal oxide film. <P>SOLUTION: In the method for producing a metal oxide film where a solution for forming a metal oxide film in which, as a metal source, a metal salt or an organometallic compound is dissolved, and a base material heated to a temperature more than a metal oxide film forming temperature are contacted, so as to obtain a metal oxide film on the base material, the solution for forming a metal oxide film comprises acid changing the crystal state of the metal oxide film. <P>COPYRIGHT: (C)2009,JPO&INPIT |
