| 摘要 |
PROBLEM TO BE SOLVED: To improve the throughput and inspection image quality of an electron beam type inspection device, and to shorten the swing return time of an output waveform of a deflection control circuit. SOLUTION: When a function of changing the scan mode on a GUI screen according to the charging characteristic of a specimen to be inspected is performed, and in the swing return period of a deflection signal that conventionally does not obtain an image according to a specific inspection condition such as the scan mode, inspection field of view, pixel size, and optical condition, the specimen having a registered pattern is radiated to obtain an image. After acquiring, a swing return analog waveform of the deflection signal is converted, the analog waveform is compared with an ideal swing return waveform, and correction data is extracted. The correction data is input into a deflection waveform data generating section, and the deflection waveform data generation is performed so that the actual waveform approaches the ideal waveform, thereby shortening the swing return period. COPYRIGHT: (C)2009,JPO&INPIT
|
