| 摘要 |
[PROBLEMS] A piezoelectric pump having a simple structure and high discharge pressure. [MEANS FOR SOLVING PROBLEMS] A first opening (11) is formed at the center of a pump body (10), and a second opening (12) is formed at a position away from the center. The outer periphery of a metal diaphragm (20) is fixed to the pump body (10), and a piezoelectric element (23) is bonded to the center on the rear side of the diaphragm (20). The piezoelectric element (23) has a size covering the first opening (11) but not reaching the second opening (12). When a voltage near the resonance frequency is applied to the piezoelectric element (23), that portion of the diaphragm (20) that faces the first opening (11) and that portion of the diaphragm (20) that faces the second opening (12) are bent and deformed in the directions opposite to each other. This causes fluid to be drawn from either one of the first opening (11) and the second opening (12) and discharged from the other. The piezoelectric pump can have high discharge pressure, which enables the pump to reliably discharge fluid even in conditions where the pressure on the discharge side is high.
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