| 摘要 |
An FIMS system in which loading is possible in a manner in which multiple thin pods are vertically stacked together, in which attraction pads are arranged on plates on which the pods are loaded, the pods being retained by and fixed to the plates through attraction and retention by the pads. A tube for imparting an attraction force to the attraction pads is accommodated in an accommodation space inside box-like member of a minimum requisite space thickness, and the region where the tube can be reflected only exists within the accommodation space.
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