FILM FORMING NOZZLE, FILM FORMING METHOD AND FILM FORMING MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a film forming nozzle that suppresses generation of bow shock on a processed surface regardless of the species of the gas used and can appropriately form a film in various types of particle deposition film forming methods even when powder particles for film forming are fine particles (with an average particle diameter of 1 to 50 μm), to provide a film forming method using the film forming nozzle, and to provide a member with a film formed by the method.

SOLUTION: The top end of the film forming nozzle is provided with a spary port to spray a mixture gas of powder particles and a high pressure gas and with an aperture near the spray port, the aperture to emit only a part of the high pressure gas.

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