| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source for uniformizing plasma density distribution in a discharge vessel. SOLUTION: The ion source 2 comprises the discharge vessel 21 with an opening 21a formed thereon, a coil 22 provided outside the discharge vessel 21, a high frequency power source 61 for supplying high frequency power to the coil 22, and an extraction electrode 25 for extracting ions in plasma generated in the discharge vessel 21 from the opening 21a. The coil 22 is provided outside the discharge vessel 21, and an axial center is positioned in the discharge vessel 21. The coil 22 is connected to the high frequency power source 61 through a matching device 62. A center electrode 23 positioned on the axial center of the coil 22, and a perimeter electrode 24 arranged so as to surround the center electrode 23 are provided in the discharge vessel 21. The center electrode 23 and the perimeter electrode 24 are provided so that at least a part of them are located in the coil 22. COPYRIGHT: (C)2009,JPO&INPIT
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