| 发明名称 |
COMPOSITION FOR FORMING SILICON-ALUMINUM FILM, SILICON-ALUMINUM FILM AND METHOD FOR FORMING THE SAME |
| 摘要 |
A composition for forming a silicon.aluminum film, containing a silicon compound and an aluminum compound. The silicon.aluminum film is obtained by forming a coating film of the above composition and treating it with heat and/or light.
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| 申请公布号 |
US2009142617(A1) |
申请公布日期 |
2009.06.04 |
| 申请号 |
US20090364599 |
申请日期 |
2009.02.03 |
| 申请人 |
JSR CORPORATION |
发明人 |
YOKOYAMA YASUAKI;YOKOYAMA MICHIKO;SHINODA NAOMI;YOKOYAMA RISA;MATSUKI YASUO |
| 分类号 |
B32B9/00;C03C17/10;B05D3/00;B05D5/12;C03C17/36;C23C18/08;C23C18/12;C23C18/14;H01B5/14;H01B13/00;H01L31/04 |
主分类号 |
B32B9/00 |
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