| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a treatment apparatus which enhances the efficiency of an operation of carrying a workpiece into or out from a treatment chamber and improves the efficiency of treating the workpiece, and to provide a treatment method therefor. <P>SOLUTION: The treatment apparatus having a treatment chamber 10 provided with a first supply/discharge port and a second supply/discharge port installed therein includes: a first transport mechanism for supplying and discharging the workpiece 30 through the first supply/discharge port; a second transport mechanism for supplying and discharging the workpiece 30 through the second supply/discharge port; an exchanging means for transferring the workpiece 30a which has been carried in by the first transport mechanism and treated, to the second transport mechanism, and transferring the workpiece 32a which has been carried in by the second transport mechanism and treated, to the first transport mechanism; and a controlling section 22 which drives the first transport mechanism and the second transport mechanism so as to supply the untreated workpiece alternately from the first supply/discharge port and the second supply/discharge port to the treatment chamber, and makes the workpiece treated in the treatment chamber. <P>COPYRIGHT: (C)2009,JPO&INPIT |
