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发明名称
Verfahren zur Transistorsherstellung
摘要
申请公布号
DE69940761(D1)
申请公布日期
2009.06.04
申请号
DE19996040761
申请日期
1999.09.09
申请人
INFINEON TECHNOLOGIES AG
发明人
RENGARAJAN, RAJESH;BEINTNER, JOCHEN;GRUENING, ULRIKE;JOACHIM, HANS-OLIVER
分类号
H01L21/8238;H01L29/78;H01L21/762;H01L21/8242;H01L27/085;H01L27/092;H01L27/108
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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