| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composite sensor that allows three-axis detection as a sensitive motion sensor, is used as a magnetic field sensor, has a simple constitution, is small, and consumes low power. <P>SOLUTION: The composite sensor includes a magnetic detection element disposed on a slope of a substrate having the slope, and a magnetic field generating section having a spindle that is supported by a beam on a substrate and has flexibility of three axis direction. The composite sensor detects the external magnetic field of a first physical quantity with the magnetic detection element, and detects a second physical quantity based on difference of output of the magnetic detection element by the position variation of the magnetic field generating section having the spindle. <P>COPYRIGHT: (C)2009,JPO&INPIT |
