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发明名称
摘要
申请公布号	JP4272547(B2)	申请公布日期	2009.06.03
申请号	JP20040016716	申请日期	2004.01.26
申请人		发明人
分类号	H01L21/338;H01L29/812;H01L21/8232;H01L27/06;H01L29/778	主分类号	H01L21/338
代理机构		代理人
主权项
地址

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