| 发明名称 |
METHOD FOR SIMULTANEOUSLY DOPING AND OXIDIZING SEMICONDUCTOR SUBSTRATES, AND ITS USE |
| 摘要 |
<p>The invention relates to a method for simultaneous doping and oxidizing semiconductor substrates and also to doped and oxidized semiconductors substrates produced in this manner. Furthermore, the invention relates to the use of this method for producing solar cells.</p> |
| 申请公布号 |
EP2064750(A2) |
申请公布日期 |
2009.06.03 |
| 申请号 |
EP20070802115 |
申请日期 |
2007.09.04 |
| 申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
BIRO, DANIEL;PREU, RALF;RENTSCH, JOCHEN |
| 分类号 |
H01L31/18;H01L31/0224 |
主分类号 |
H01L31/18 |
| 代理机构 |
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代理人 |
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