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发明名称
Method of producing a dopant gas species
摘要
申请公布号
GB2422719(B)
申请公布日期
2009.06.03
申请号
GB20050025256
申请日期
2005.12.12
申请人
APPLIED MATERIALS, INC.
发明人
GEOFFREY RYDING;SHU SATOH
分类号
H01J37/08;H01J37/317
主分类号
H01J37/08
代理机构
代理人
主权项
地址
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