| 摘要 |
<p>A load-lock designs and a methods for using same is provided to pump a gas outside of a wafer by pumping the gas with a ring-shape ring chamber. In a load-lock, a transfer module(106) transfers/ returns a wafer to a processing module from a stage cassette. A ventilation operation process and pump work process are operated in parallel, and a stacked independent load-lock(104) is formed to be optimal to particle reduction. The vent and pump down of a load lock are made as a ring-shape.</p> |
