发明名称 Spatial and spectral wavefront analysis and measurement
摘要 A method and apparatus for wavefront analysis including obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase, obtaining a plurality of intensity maps of the plurality of phase changed transformed wavefronts and employing the plurality of intensity maps to obtain an output indicating the amplitude and phase of the wavefront being analyzed.
申请公布号 US7542144(B2) 申请公布日期 2009.06.02
申请号 US20070998564 申请日期 2007.11.30
申请人 ICOS VISION SYSTEMS N.V. 发明人 ARIELI YOEL;WOLFLING SHAY;SHEKEL EVAL
分类号 G01B9/02 主分类号 G01B9/02
代理机构 代理人
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