High-peak-power laser device and application to the generation of light in the extreme ultraviolet,申请号KR20087013881-传众专利搜索

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发明名称	High-peak-power laser device and application to the generation of light in the extreme ultraviolet
摘要
申请公布号	KR100900164(B1)	申请公布日期	2009.06.02
申请号	KR20087013881	申请日期	2008.06.09
申请人		发明人
分类号	H01L21/027;H01S3/23;G03F7/20;H01S3/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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