POLISHING HEAD, POLISHING APPARATUS AND WORK REMOVING METHOD

摘要

A polishing head (11) is provided with a disc-like carrier (13) whereupon an annular protruding section (13a) and a carrier locking section (13b) are formed at the periphery; a disc-like head main body (12) whereupon an annular head main body locking section (12a) is formed on the outer side; a diaphragm (14) for connecting the head main body and the carrier; and a spacer (15) positioned between the carrier locking section and the head main body locking section, at a part of the carrier locking section and/or the head main body locking section. When the head main body in brought up, since the carrier locking section and/or the head main body locking section is permitted to abut to the spacer, the carrier is tilted to be brought up, and a work (W) is removed from a polishing cloth. Thus, the work can be easily, safely and surely removed from the polishing cloth by bringing up the polishing head, which is holding the work, without forming a groove on the polishing cloth and overhanging the polishing head from a surface table.