| 摘要 |
PROBLEM TO BE SOLVED: To provide a length measuring method capable of determining accurately a position of an interference fringe without being influenced by amplitude fluctuation of the interference fringe. SOLUTION: A size measuring method utilizing a tandem low coherence interferometer 1 wherein a measuring interferometer 3 is connected to a reference interferometer 4 through an optical fiber 5, which is a high-precision length measuring method by a coincidence method of low coherence interference, is characterized as follows: two wavelengths having each different center wavelength are input into the tandem low coherence interferometer 1 by a low coherence light source; each interference fringe on two points (a gage surface and a base plate surface) of a block gage 2 to be measured is formed relative to the two respective wavelengths; each phase of mutually corresponding interference fringes on the two points is measured; and a distance between the two points of a measuring object is determined by a combination of phases of mutually most coincident values relative to the phases measured respectively with respect to the two respective wavelengths. COPYRIGHT: (C)2009,JPO&INPIT
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