| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid jet head capable of surely preventing breakage of a lower electrode and a piezoelectric element, and a manufacturing method of a piezoelectric element. <P>SOLUTION: The method includes the step of: stacking an adhesion layer of titanium, a platinum layer of platinum, titanium layer of titanium and a diffusion-preventing layer of iridium, which overlie, in this order, one surface of a conduit-forming substrate on which a pressure-generating chamber communicating with a nozzle opening for jetting a liquid, to form the lower electrode 60; forming a piezoelectric precursor film on the lower electrode 60 and sintering the same to form a piezoelectric layer 70; and forming an upper electrode on the piezoelectric layer 70 to form the piezoelectric element comprising the lower electrode 60, the piezoelectric layer 70 and the upper electrode 80. <P>COPYRIGHT: (C)2009,JPO&INPIT |
