| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus based on the Czochralski method, which can secure safety and good workability in works for recovering a crystal and constructing a heat constitution section and is reduced in size and cost, and further, which can reduce the height of a building structure for installing the apparatus therein and miniaturize incidental equipment. SOLUTION: In the single crystal pulling apparatus based on the Czochralski method, a chamber 4 of a water-cooling system for protecting and shielding the heat constitution section constituted of a crucible 2 and a heating source such as a work coil 3 from the outside is configured so that it can be divided in the vertical direction and the divided chamber 4 can be moved in a horizontal direction or opened or closed, and the inner surface of the chamber 4 is covered with a highly conductive metal. COPYRIGHT: (C)2009,JPO&INPIT
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