| 摘要 |
PROBLEM TO BE SOLVED: To determine in real time whether a test condition of a semiconductor device is set correctly. SOLUTION: This semiconductor inspection device 50 includes a controller 1, an evaluation device 2, an interface 4, a laser generating section 5, a polarization device 6, an objective lens 7, a camera stage 8, an image memory 9, and a display device 10. The semiconductor inspection device 50 irradiates the semiconductor device (DUT (Device under Test)) 3 with a laser beam, and specifies a failure part of the semiconductor device (DUT) 3 using the DLS (Dynamic Laser Stimulation) method. In the failure analysis of the semiconductor device (DUT) 3, the inspection device counts the number of inputs of a pass signal or a fail signal of the semiconductor device (DUT) 3 in a user's specified period, and displays the pass rate or fail rate of the semiconductor device (DUT) 3 to the counting number of a test start signal Sts or test completion signal Ste. COPYRIGHT: (C)2009,JPO&INPIT
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