| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliable sensor assembly for preventing corrosion from occurring due to penetration of corrosive moisture even if the low-pressure side of the sensor assembly is exposed to the atmosphere by applying water-repellent dry coating to the inner wall of a pressure lead-in hole at the low-pressure sides of support glass and a hermetic body (pedestal) including a junction section. SOLUTION: The pressure sensor includes: the pedestal in which a first pressure lead-in hole is bored; and the support glass having a second pressure lead-in hole that is positioned in the first pressure lead-in hole for communication. After the support glass is subjected to low-melt-point glass joining to the pedestal, the inner wall of the first pressure lead-in hole and that of the second pressure lead-in hole are subjected to water-repellent coating. Then, the pressure sensor is joined to the opposite side of the low-melt-point glass-joined surface of the support glass by anodic bonding. COPYRIGHT: (C)2009,JPO&INPIT
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