CERAMIC FILM AND MANUFACTURING METHOD THEREOF, SEMICONDUCTOR DEVICE, PIEZOELECTRIC ELEMENT, AND ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic film capable of improving the surface morphology of the ceramic film, to provide the obtained ceramic film, and to provide a semiconductor device and a piezoelectric element to which the ceramic film is applied.

SOLUTION: The manufacturing method of a ceramic film includes a step of forming the ceramic film 30 by crystallizing a raw material body 20. The raw material body 20 contains different types of raw materials in a mixed state, and the different types of raw materials differ from one another, in at least one of a crystal growth condition and a crystal growth mechanism in the crystallization of the raw materials.

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