| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve device that can be compactly configured and executes communication between each discharge-side flow path and an inlet-side flow path in a short period of time while allowing arrangement of a large number of discharge-side flow paths. SOLUTION: The valve device has a plurality of nozzles 4A, 4B, which are protrudingly provided on one face of a substrate 3 while penetrating through the substrate 3 so as to correspond to any one of a plurality of discharge-side flow paths and to be arrayed in the circumferential direction of the substrate 3, a freely rotatable nozzle-switching plate 14, which is brought into pressure contact with the rear face 3C of the face 3B, where the nozzles 4A, 4B of the substrate 3 protrude in order to selectively cover an opening 5 of each nozzle 4 formed in the substrate 3 while being made to communicate with an inlet-side flow path 32, and a drive means 10 that rotationally drives the nozzle-switching plate 14 so that the inlet-side flow path 32 communicates with a specific discharge-side flow path. COPYRIGHT: (C)2009,JPO&INPIT
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